U.S. federal trademark · Serial No. 85015905 · Reg. No. 4010192
Semiconductor wafer processing machines; atomic layer deposition machines for performing atomic deposition layering; deposition systems, comprised of a reaction chamber, precursor lines, and a cabinet, all sold as a unit, for use in applying atomic layer coatings on various surfaces
Source: USPTO federal trademark records. Informational only, not legal advice. Status and details may lag the live USPTO database.