coating machine for the production or manufacture of epitaxial layers over disk-shaped substrates under ultra-high vacuum by decreasing temperatures eliminating the vapor phase, essentially consisting of a quartz-rod oven, a load and unload apparatus, a vacuum pump stand, gas supply fixtures, and an electronic control unit, all sold as a unit for coating substrates

'apparatus':40 'coat':1,59 'consist':29 'control':51 'decreas':22 'disk':13 'disk-shap':12 'electron':50 'elimin':24 'epitaxi':9 'essenti':28 'fixtur':47 'gas':45 'high':19 'layer':10 'load':37 'machin':2 'manufactur':7 'oven':35 'phase':27 'product':5 'pump':43 'quartz':33 'quartz-rod':32 'rod':34 'shape':14 'sold':54 'stand':44 'substrat':15,60 'suppli':46 'temperatur':23 'ultra':18 'ultra-high':17 'unit':52,57 'unload':39 'vacuum':20,42 'vapor':26

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