semiconductor wafer processing equipment and components, namely, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanter, supporting frames therefor; and parts thereof; and computer operating programs

'chemic':10 'compon':6 'comput':29 'deposit':12,16 'epitaxi':8 'equip':4 'etcher':19 'frame':23 'implant':21 'ion':20 'name':7 'oper':30 'part':26 'physic':14 'plasma':18 'process':3 'program':31 'reactor':9,13,17 'semiconductor':1 'support':22 'therefor':24 'thereof':27 'vapor':11,15 'wafer':2

repair and maintenance services for such semiconductor wafer processing equipment, components and computer programs

'compon':11 'comput':13 'equip':10 'mainten':3 'process':9 'program':14 'repair':1 'semiconductor':7 'servic':4 'wafer':8

SMART PVD

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