Semiconductor wafer processing equipment, and components, namely; epitaxial reactors; chemical vapor deposition reactors; physical vapor deposition reactors; plasma etchers; ion implanters; supporting frames therefor, chemical mechanical polishers; semiconductor wafer process and diagnostic and control equipment; and computer operated programs for use therewith

'chemic':10,25 'compon':6 'comput':37 'control':34 'deposit':12,16 'diagnost':32 'epitaxi':8 'equip':4,35 'etcher':19 'frame':23 'implant':21 'ion':20 'mechan':26 'name':7 'oper':38 'physic':14 'plasma':18 'polish':27 'process':3,30 'program':39 'reactor':9,13,17 'semiconductor':1,28 'support':22 'therefor':24 'therewith':42 'use':41 'vapor':11,15 'wafer':2,29

SMART SYSTEM

Owner

Goods & Services