Software for use in data mining and analysis of the performance of photolithography tool clusters and their components, such as photolithography lasers, photolithography tracks, photolithography scanners, and of load ports interaction, during the process of fabrication of semiconductors

'analysi':8 'cluster':15 'compon':18 'data':5 'fabric':36 'interact':31 'laser':22 'load':29 'mine':6 'perform':11 'photolithographi':13,21,23,25 'port':30 'process':34 'scanner':26 'semiconductor':38 'softwar':1 'tool':14 'track':24 'use':3

SMARTLITHO

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