Machines of modular design for vacuum coating of work pieces having the form of a foil or tape with thin layers of metallic, ceramic, electrically conductive non-metallic, optically effective and/or gas barrier including materials, loading and unloading machines for production or operation in clean rooms, as well as their structural and replacement parts for their operation and maintenance

'and/or':32 'barrier':34 'ceram':24 'clean':46 'coat':7 'conduct':26 'design':4 'effect':31 'electr':25 'foil':16 'form':13 'gas':33 'includ':35 'layer':21 'load':37 'machin':1,40 'mainten':60 'materi':36 'metal':23,29 'modular':3 'non':28 'non-metal':27 'oper':44,58 'optic':30 'part':55 'piec':10 'product':42 'replac':54 'room':47 'structur':52 'tape':18 'thin':20 'unload':39 'vacuum':6 'well':49 'work':9

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