Software programs for automating semiconductor manufacturing, namely software programs that implement SECS (Semiconductor Equipment Communication Standard) messages having a structured notation that define stream and function codes for the messages to automate communications with semiconductor manufacturing tools

'autom':4,32 'code':27 'communic':15,33 'defin':23 'equip':14 'function':26 'implement':11 'manufactur':6,36 'messag':17,30 'name':7 'notat':21 'program':2,9 'sec':12 'semiconductor':5,13,35 'softwar':1,8 'standard':16 'stream':24 'structur':20 'tool':37

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