[ Maintenance and repair of semiconductor processing and production equipment]

'equip':9 'mainten':1 'process':6 'product':8 'repair':3 'semiconductor':5

Semiconductor processing and manufacturing equipment having coating, developing, and thermal treatment capabilities used for the processing and production of semiconductor substrates, thin films, photo-resist materials, silicon discs and wafers

'capabl':12 'coat':7 'develop':8 'disc':29 'equip':5 'film':23 'manufactur':4 'materi':27 'photo':25 'photo-resist':24 'process':2,16 'product':18 'resist':26 'semiconductor':1,20 'silicon':28 'substrat':21 'thermal':10 'thin':22 'treatment':11 'use':13 'wafer':31

SOKUDO

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