Vacuum pumps; vacuum pump stations consisting of vacuum pumps; vacuum pumps and vacuum pump machine parts, namely, crankcases and pump racks; Semiconductor wafer processing system for processing semiconductors under vacuum comprising vacuum pumps, valves for pumps, exhaust gas purification installations, electronic controls and cooling devices, namely, cooling radiators for motors and engines, all sold as a unit; all the aforementioned products intended exclusively for use in the semiconductor industry

'aforement':60 'compris':31 'consist':6 'control':42 'cool':44,47 'crankcas':18 'devic':45 'electron':41 'engin':52 'exclus':63 'exhaust':37 'gas':38 'industri':69 'instal':40 'intend':62 'machin':15 'motor':50 'name':17,46 'part':16 'process':24,27 'product':61 'pump':2,4,9,11,14,20,33,36 'purif':39 'rack':21 'radiat':48 'semiconductor':22,28,68 'sold':54 'station':5 'system':25 'unit':57 'use':65 'vacuum':1,3,8,10,13,30,32 'valv':34 'wafer':23

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