radio frequency-generated gas plasma cleaning chamber for the removal of hydrocarbon contamination from the surface of electron microscope samples and holders; incorporating a port for the deposit of microscope samples and holders, a gas plasma generater and flow controller, a radio frequency (RF) power generator, turbomolecular and multistage diaphragm pumps for vacuuming gas plasma from the cleaning chamber, and computer hardware and software for operation of the cleaning chamber

'chamber':8,60,71 'clean':7,59,70 'comput':62 'contamin':14 'control':41 'deposit':29 'diaphragm':51 'electron':19 'flow':40 'frequenc':3,44 'frequency-gener':2 'gas':5,36,55 'generat':4,38,47 'hardwar':63 'holder':23,34 'hydrocarbon':13 'incorpor':24 'microscop':20,31 'multistag':50 'oper':67 'plasma':6,37,56 'port':26 'power':46 'pump':52 'radio':1,43 'remov':11 'rf':45 'sampl':21,32 'softwar':65 'surfac':17 'turbomolecular':48 'vacuum':54

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