Semiconductor manufacturing equipment having a remote plasma source, namely chemical vapor deposition systems, for the manufacturing of integrated circuits

'chemic':10 'circuit':19 'deposit':12 'equip':3 'integr':18 'manufactur':2,16 'name':9 'plasma':7 'remot':6 'semiconductor':1 'sourc':8 'system':13 'vapor':11

Chemical vapor deposition equipment and apparatus having a remote plasma source for the processing and production of semiconductor thin films

'apparatus':6 'chemic':1 'deposit':3 'equip':4 'film':20 'plasma':10 'process':14 'product':16 'remot':9 'semiconductor':18 'sourc':11 'thin':19 'vapor':2

SOLIS

Owners

Goods & Services