Metrology systems for the semiconductor industry comprising automated critical dimension scanning electron microscopes, and optical critical dimension scanning electron microscopes, used in the measurement, development, fabrication and manufacture of state of the art integrated circuits and semiconductor devices

'art':33 'autom':8 'circuit':35 'compris':7 'critic':9,16 'develop':25 'devic':38 'dimens':10,17 'electron':12,19 'fabric':26 'industri':6 'integr':34 'manufactur':28 'measur':24 'metrolog':1 'microscop':13,20 'optic':15 'scan':11,18 'semiconductor':5,37 'state':30 'system':2 'use':21

Services in the semiconductor industry, namely, installation, maintenance of metrology systems

'industri':5 'instal':7 'mainten':8 'metrolog':10 'name':6 'semiconductor':4 'servic':1 'system':11

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