laboratory equipment for use with vacuum chambers, namely, sputtering sources used to deposit metallic, insulating, or semiconducting thin films inside a vacuum chamber

'chamber':7,23 'deposit':13 'equip':2 'film':19 'insid':20 'insul':15 'laboratori':1 'metal':14 'name':8 'semiconduct':17 'sourc':10 'sputter':9 'thin':18 'use':4,11 'vacuum':6,22

Industrial equipment for use with vacuum chambers in connection with manufacturing optical coatings, semiconductor devices, magnetic data storage media, solar cells, protective coatings, or decorative surfaces on various substrates, namely, sputtering sources used to deposit metallic, insulating, or semiconducting thin films inside a vacuum chamber

'cell':21 'chamber':7,45 'coat':13,23 'connect':9 'data':17 'decor':25 'deposit':35 'devic':15 'equip':2 'film':41 'industri':1 'insid':42 'insul':37 'magnet':16 'manufactur':11 'media':19 'metal':36 'name':30 'optic':12 'protect':22 'semiconduct':39 'semiconductor':14 'solar':20 'sourc':32 'sputter':31 'storag':18 'substrat':29 'surfac':26 'thin':40 'use':4,33 'vacuum':6,44 'various':28

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