Optical scanners; Optical sensors; Optical inspection apparatus for industrial use; Laser measuring systems; Surveying apparatus; Optical inspection apparatus; Semiconductor testing apparatus; Integrated circuit handlers, namely, machines for testing integrated circuits; Optical inspection apparatus for inspection of semiconductor materials, namely, semiconductor wafers, reticles, and photomasks; Laser scanners for industrial inspection

'apparatus':7,15,18,21,33 'circuit':23,30 'handler':24 'industri':9,48 'inspect':6,17,32,35,49 'integr':22,29 'laser':11,45 'machin':26 'materi':38 'measur':12 'name':25,39 'optic':1,3,5,16,31 'photomask':44 'reticl':42 'scanner':2,46 'semiconductor':19,37,40 'sensor':4 'survey':14 'system':13 'test':20,28 'use':10 'wafer':41

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