Optical emission spectrometers; Optical emission spectrometers featuring plasma generators; Mass spectrometers featuring plasma generators; Mass spectrometers for analyzing semiconductor process gases; Mass spectrometers for use in semiconductor manufacturing; Optical emission spectrometers for analyzing semiconductor process gases; Optical emission spectrometers for use in semiconductor manufacturing; Ionization apparatus for mass spectrometry; Plasma generators for mass spectrometry; Ionization apparatus for optical emission spectrometers; Mass spectrometers; Spectrographs; Spectrophotometers; Real-time gas analyzers; Ion analyzers

'analyz':18,33,69,71 'apparatus':46,56 'emiss':2,5,30,38,59 'featur':7,12 'gas':68 'gase':21,36 'generat':9,14,51 'ion':70 'ioniz':45,55 'manufactur':28,44 'mass':10,15,22,48,53,61 'optic':1,4,29,37,58 'plasma':8,13,50 'process':20,35 'real':66 'real-tim':65 'semiconductor':19,27,34,43 'spectrograph':63 'spectromet':3,6,11,16,23,31,39,60,62 'spectrometri':49,54 'spectrophotomet':64 'time':67 'use':25,41

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