computer hardware and software used for testing, inspecting, characterizing, and predicting physical properties of semiconductors and integrated circuits; computer hardware and software used for monitoring, controlling, and improving semiconductor and integrated circuit manufacturing processes; computer hardware and software used for event prediction in the manufacturing of semiconductors and integrated circuits

'character':9 'circuit':18,32,50 'comput':1,19,35 'control':26 'event':41 'hardwar':2,20,36 'improv':28 'inspect':8 'integr':17,31,49 'manufactur':33,45 'monitor':25 'physic':12 'predict':11,42 'process':34 'properti':13 'semiconductor':15,29,47 'softwar':4,22,38 'test':7 'use':5,23,39

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