Cathodes and parts of cathodes, namely, end blocks, magnetic assemblies, electronic control panel, and process gas systems, namely, mass flow controllers, gas piping, and gas distribution manifold; cathode end blocks; cathode lid systems comprised of cathode end blocks, magnet bars, electronic controls and process gas systems, namely, mass flow controllers, gas piping and gas distribution manifold

'assembl':10 'bar':40 'block':8,30,38 'cathod':1,5,28,31,36 'compris':34 'control':12,21,42,50 'distribut':26,55 'electron':11,41 'end':7,29,37 'flow':20,49 'gas':16,22,25,45,51,54 'lid':32 'magnet':9,39 'manifold':27,56 'mass':19,48 'name':6,18,47 'panel':13 'part':3 'pipe':23,52 'process':15,44 'system':17,33,46

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