Metal containers for storage of solid and liquid chemicals and delivery of vapor-phase material therefrom; metal inlet and outlet valves; metal manifolds for transferring chemicals; pipes and tubes of metal for transferring chemicals; all of the identified goods for use in chemical delivery systems

'chemic':9,27,35,44 'contain':2 'deliveri':11,45 'good':40 'identifi':39 'inlet':19 'liquid':8 'manifold':24 'materi':16 'metal':1,18,23,32 'outlet':21 'phase':15 'pipe':28 'solid':6 'storag':4 'system':46 'therefrom':17 'transfer':26,34 'tube':30 'use':42 'valv':22 'vapor':14 'vapor-phas':13

Solid and liquid chemicals provided in a vapor supply container for use in generating vapor for microelectronic device manufacturing

'chemic':4 'contain':10 'devic':18 'generat':14 'liquid':3 'manufactur':19 'microelectron':17 'provid':5 'solid':1 'suppli':9 'use':12 'vapor':8,15

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