Getter vacuum pumps and structural parts thereof

'getter':1 'part':6 'pump':3 'structur':5 'thereof':7 'vacuum':2

scientific apparatus and instruments for perfecting and maintaining vacuum, namely, getter vacuum pumps for laboratory use in particle accelerators, medical accelerators, lithographic systems, UHV chambers for materials and surface science investigation, film deposition apparatus, molecular beam epitaxy, surface science apparatus, mass spectrometers, electron microscope, chambers in high, ultra high and extreme high vacuum, thermal process chambers, surface science, material science, particle accelerators, semiconductor, film deposition, lithography, medical accelerators, defence or detection, photocathode, multiphotocathode, high voltage electron gun, high voltage electron source

'acceler':19,21,62,68 'apparatus':2,34,40 'beam':36 'chamber':25,45,56 'defenc':69 'deposit':33,65 'detect':71 'electron':43,76,80 'epitaxi':37 'extrem':51 'film':32,64 'getter':11 'gun':77 'high':47,49,52,74,78 'instrument':4 'investig':31 'laboratori':15 'lithograph':22 'lithographi':66 'maintain':8 'mass':41 'materi':27,59 'medic':20,67 'microscop':44 'molecular':35 'multiphotocathod':73 'name':10 'particl':18,61 'perfect':6 'photocathod':72 'process':55 'pump':13 'scienc':30,39,58,60 'scientif':1 'semiconductor':63 'sourc':81 'spectromet':42 'surfac':29,38,57 'system':23 'thermal':54 'uhv':24 'ultra':48 'use':16 'vacuum':9,12,53 'voltag':75,79

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