Research in the area of semiconductor processing technology

'area':4 'process':7 'research':1 'semiconductor':6 'technolog':8

Industrial surface treatment equipment, namely, vacuum plasma treatment systems comprised of a high frequency, high voltage generator, controls, and treatment chamber and structural parts therefor; Semiconductor wafer processing equipment; Machines for manufacturing semiconductors

'chamber':21 'compris':10 'control':18 'equip':4,29 'frequenc':14 'generat':17 'high':13,15 'industri':1 'machin':30 'manufactur':32 'name':5 'part':24 'plasma':7 'process':28 'semiconductor':26,33 'structur':23 'surfac':2 'system':9 'therefor':25 'treatment':3,8,20 'vacuum':6 'voltag':16 'wafer':27

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