"computers, computer operating system software, and computer application software, all for the control and operation of thin film processing equipment, wafer processing equipment, etch technology processing equipment, and deposition technology processing equipment, in the manufacture and processing of computer hardware, computer software, and computer components, namely, semiconductors, integrated circuits, and flat panel displays"

'applic':8 'circuit':49 'compon':45 'comput':1,2,7,39,41,44 'control':13 'deposit':29 'display':53 'equip':20,23,27,32 'etch':24 'film':18 'flat':51 'hardwar':40 'integr':48 'manufactur':35 'name':46 'oper':3,15 'panel':52 'process':19,22,26,31,37 'semiconductor':47 'softwar':5,9,42 'system':4 'technolog':25,30 'thin':17 'wafer':21

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