machine parts, namely single and two-stage rotary pumps in standard and chemical resistance versions, roots and diffusion pumps, pneumatic vacuum valves, manual vacuum valves, electromagnetic vacuum valves and thin-film deposition machines used in electronic optical and metallurgical industries

'chemic':14 'deposit':34 'diffus':19 'electromagnet':27 'electron':38 'film':33 'industri':42 'machin':1,35 'manual':24 'metallurg':41 'name':3 'optic':39 'part':2 'pneumat':21 'pump':10,20 'resist':15 'root':17 'rotari':9 'singl':4 'stage':8 'standard':12 'thin':32 'thin-film':31 'two':7 'two-stag':6 'use':36 'vacuum':22,25,28 'valv':23,26,29 'version':16

vacuum induction furnaces, vacuum ovens, vacuum furnaces and vacuum dryers

'dryer':10 'furnac':3,7 'induct':2 'oven':5 'vacuum':1,4,6,9

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