computer software for displaying thermal data from an instrumented wafer in a wafer fabrication system and software user guides and reference manuals packaged as a unit used in the field of semiconductor manufacturing liquid crystal display manufacturing and hard disk drive manufacturing

'comput':1 'crystal':35 'data':6 'disk':40 'display':4,36 'drive':41 'fabric':14 'field':30 'guid':19 'hard':39 'instrument':9 'liquid':34 'manual':22 'manufactur':33,37,42 'packag':23 'refer':21 'semiconductor':32 'softwar':2,17 'system':15 'thermal':5 'unit':26 'use':27 'user':18 'wafer':10,13

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