U.S. federal trademark · Serial No. 98286124 · Reg. No. 18909978
Coating machine for thin film application; Sputtering machine; Machine tools, namely, process modules for oxidation, preclean modules, deposition modules, rotating substrate modules and linear dynamic deposition modules as parts of a cluster modular machine for coating; Machine Systems including machines and machine tools for processes, namely, coating processes, surface treatment processes, semiconductor frontend process, semiconductor backend process and wafer level packaging processes
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