TOPBEAM

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electric monitoring and control instruments for vacuum coating

Machines and structural parts, for the coating of foils, namely, foils consisting of plastic and/or paper, with metallic and/or non-metallic layers, namely, oxidic layers, and installations assembled therefrom, namely, for vacuum coating by vapour-deposition, by cathodic sputtering or by a low-pressure plasma pretreatment of the foils to be coated and/or plasma aftertreatment of the coated foils, comprising vacuum chambers, vacuum pumps, reeling devices, electron emitters, namely, electron-beam guns and also generator chambers, cathode arrangements or crucible arrangements, electron-beam evaporators, resistance evaporators, microwave generators and microwave conductors, devices for supplying the vacuum chambers with process gases, namely, pumps, hoses, tubes, pipes and gas showers