Electrical/electronic apparatus-namely, electrostatic voltmeters, power supplies, amplifiers, electrostatic sensors, voltmeter probes, voltage monitors, electrostatic clamps for semiconductors, platens for electrostatic wafer clamps, a;c; and d;c; generators, electric field meters, ion monitors and charge monitors

'amplifi':9 'apparatus':3 'apparatus-nam':2 'c':26,29 'charg':37 'clamp':17,24 'd':28 'electr':31 'electrical/electronic':1 'electrostat':5,10,16,22 'field':32 'generat':30 'ion':34 'meter':33 'monitor':15,35,38 'name':4 'platen':20 'power':7 'probe':13 'semiconductor':19 'sensor':11 'suppli':8 'voltag':14 'voltmet':6,12 'wafer':23

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