E-Beam test apparatus and software used for internal analysis and correcting failures of integrated circuits, and for automated testing and imaging, and for modification of electronic circuits by etching material, and depositing material, on semiconductor wafers and electronic circuits

'analysi':11 'apparatus':5 'autom':20 'beam':3 'circuit':17,29,41 'correct':13 'deposit':34 'e':2 'e-beam':1 'electron':28,40 'etch':31 'failur':14 'imag':23 'integr':16 'intern':10 'materi':32,35 'modif':26 'semiconductor':37 'softwar':7 'test':4,21 'use':8 'wafer':38

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