Power-operated machine tool for use in the semiconductor manufacturing industry for applying chemical solutions such as water, acids, bases, and/or solvents onto one or more substrates simultaneously in order modify the surface of silicon, glass, ceramic, polymer and metal substrates

'acid':20 'and/or':22 'appli':14 'base':21 'ceram':38 'chemic':15 'glass':37 'industri':12 'machin':4 'manufactur':11 'metal':41 'modifi':32 'one':25 'onto':24 'oper':3 'order':31 'polym':39 'power':2 'power-oper':1 'semiconductor':10 'silicon':36 'simultan':29 'solut':16 'solvent':23 'substrat':28,42 'surfac':34 'tool':5 'use':7 'water':19

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