Power source control units for application in manufacturing and controlling processes as applied to the gas-phase, thin film, and semiconductor industries; power controllers, power supplies, electronic plasma power and plasma production products, namely impedance matching plasma power networks used for plasma generation for laboratory use

'appli':13 'applic':6 'control':3,10,25 'electron':28 'film':20 'gas':17 'gas-phas':16 'generat':44 'imped':36 'industri':23 'laboratori':46 'manufactur':8 'match':37 'name':35 'network':40 'phase':18 'plasma':29,32,38,43 'power':1,24,26,30,39 'process':11 'product':33,34 'semiconductor':22 'sourc':2 'suppli':27 'thin':19 'unit':4 'use':41,47

Equipment and machinery for plasma generation, namely impedance matching plasma power networks used for plasma generation

'equip':1 'generat':6,16 'imped':8 'machineri':3 'match':9 'name':7 'network':12 'plasma':5,10,15 'power':11 'use':13

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