precision optics, namely, lens housings with ultra-high density deep UV optical disks, photo lithographic catadioptric reduction lenses; metrology instruments, namely, interferometers, [diffractive cylinder] grazing-incidence interferometer, laser based interferometer for measuring deviations from flatness of a surface, apparatus for analyzing semiconductor wafers during the polishing process

'analyz':43 'apparatus':41 'base':31 'catadioptr':17 'cylind':25 'deep':11 'densiti':10 'deviat':35 'diffract':24 'disk':14 'flat':37 'graze':27 'grazing-incid':26 'high':9 'hous':5 'incid':28 'instrument':21 'interferomet':23,29,32 'laser':30 'len':4 'lens':19 'lithograph':16 'measur':34 'metrolog':20 'name':3,22 'optic':2,13 'photo':15 'polish':48 'precis':1 'process':49 'reduct':18 'semiconductor':44 'surfac':40 'ultra':8 'ultra-high':7 'uv':12 'wafer':45

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