precision optics, namely, lens housings with ultra-high density deep UV optical disks, photolithographic catadioptric reduction lenses; metrology instruments, namely, interferometers, diffractive cylinder grazing-incidence interferometer, laser based interferometer for measuring deviations from flatness of a surface, apparatus for analyzing semiconductor wafers during the polishing process

'analyz':42 'apparatus':40 'base':30 'catadioptr':16 'cylind':24 'deep':11 'densiti':10 'deviat':34 'diffract':23 'disk':14 'flat':36 'graze':26 'grazing-incid':25 'high':9 'hous':5 'incid':27 'instrument':20 'interferomet':22,28,31 'laser':29 'len':4 'lens':18 'measur':33 'metrolog':19 'name':3,21 'optic':2,13 'photolithograph':15 'polish':47 'precis':1 'process':48 'reduct':17 'semiconductor':43 'surfac':39 'ultra':8 'ultra-high':7 'uv':12 'wafer':44

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