Thin-film solar cells and modules; crystalline-silicon solar cells and modules; solar panels for production of energy; Balance of Systems (BoS) solar photovoltaic equipment, namely, inverters; Production equipment used in thin-film solar module manufacturing, namely, evaporation chambers, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, ion implanters, and operational software sold as a component for any of the foregoing; all for the processing and production of thin films on various substrates

'balanc':21 'bos':24 'cell':5,12 'chamber':42 'chemic':45 'compon':61 'crystallin':9 'crystalline-silicon':8 'deposit':47,51 'energi':20 'epitaxi':43 'equip':27,31 'evapor':41 'film':3,36,75 'forego':66 'implant':54 'invert':29 'ion':53 'manufactur':39 'modul':7,14,38 'name':28,40 'oper':56 'panel':16 'photovolta':26 'physic':49 'process':70 'product':18,30,72 'reactor':44,48,52 'silicon':10 'softwar':57 'solar':4,11,15,25,37 'sold':58 'substrat':78 'system':23 'thin':2,35,74 'thin-film':1,34 'use':32 'vapor':46,50 'various':77

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