Structural parts and replacement parts of mechanical vacuum coating machines in the nature of devices for cathode sputtering in the reactive and metallic mode, namely, cathodes being parts of vacuum tubes, targets, vacuum chambers; and electrical machines for carrying out a sputter process

'carri':39 'cathod':17,26 'chamber':34 'coat':9 'devic':15 'electr':36 'machin':10,37 'mechan':7 'metal':23 'mode':24 'name':25 'natur':13 'part':2,5,28 'process':43 'reactiv':21 'replac':4 'sputter':18,42 'structur':1 'target':32 'tube':31 'vacuum':8,30,33

Parts of mechanical vacuum coating machines in the nature of devices for cathode sputtering in the reactive and metallic mode, namely, cathodes being parts of vacuum tubes, and vacuum chambers

'cathod':13,22 'chamber':30 'coat':5 'devic':11 'machin':6 'mechan':3 'metal':19 'mode':20 'name':21 'natur':9 'part':1,24 'reactiv':17 'sputter':14 'tube':27 'vacuum':4,26,29

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