Electrical reactors for processing semiconductor wafers; reactors for processing semiconductor wafers, namely, chemical reactors for the thermal treatment of semiconductor wafers and reactors for chemical vapor deposition

'chemic':13,25 'deposit':27 'electr':1 'name':12 'process':4,9 'reactor':2,7,14,23 'semiconductor':5,10,20 'thermal':17 'treatment':18 'vapor':26 'wafer':6,11,21

machines for manufacturing semiconductors, and structural parts and fittings therefor; semiconductor manufacturing machines; machines for the treatment of semiconductor wafers, namely, semiconductor wafer processing equipment, and structural parts and fittings therefor; industrial chemical reactors

'chemic':33 'equip':25 'fit':9,30 'industri':32 'machin':1,13,14 'manufactur':3,12 'name':21 'part':7,28 'process':24 'reactor':34 'semiconductor':4,11,19,22 'structur':6,27 'therefor':10,31 'treatment':17 'wafer':20,23

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