dry semiconductor processing equipment, namely downstream microwave/photo-chemical cluster strip systems, comprising vacuum transfer robots and vacuum cassette elevator modules, gas-phase cleaning modules, and downstream microwave photo-resist strip modules

'cassett':17 'clean':23 'cluster':8 'compris':11 'downstream':6,26 'dri':1 'elev':18 'equip':4 'gas':21 'gas-phas':20 'microwav':27 'microwave/photo-chemical':7 'modul':19,24,32 'name':5 'phase':22 'photo':29 'photo-resist':28 'process':3 'resist':30 'robot':14 'semiconductor':2 'strip':9,31 'system':10 'transfer':13 'vacuum':12,16

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