Metrology system for inspection and measurement of semiconductor wafers and similar substrates in various stages of processing comprised of an interferometric imaging microscope, an image processing and control computer, load ports for receiving wafers, automated axis drives for loading and positioning the wafer, and a clean air handling unit sold as a unit

'air':47 'autom':35 'axi':36 'clean':46 'compris':18 'comput':29 'control':28 'drive':37 'handl':48 'imag':22,25 'inspect':4 'interferometr':21 'load':30,39 'measur':6 'metrolog':1 'microscop':23 'port':31 'posit':41 'process':17,26 'receiv':33 'semiconductor':8 'similar':11 'sold':50 'stage':15 'substrat':12 'system':2 'unit':49,53 'various':14 'wafer':9,34,43

UNIFIRE

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