illumination, inspection and measurement apparatus for use with stepper, scanner, full field laser processing and imaging, and electron beam system machines for use in manufacturing semiconductor wafers and substrates, and flat panel displays; computer software for use in controlling heat treating cleaning, etching, implanting, leveling, electron beam, stepper, scanner and full field laser processing, imaging and leveling machines for manufacturing semiconductor wafers and substrates and flat panel displays; and operating manuals sold together therewith

'apparatus':5 'beam':19,47 'clean':42 'comput':34 'control':39 'display':33,68 'electron':18,46 'etch':43 'field':12,52 'flat':31,66 'full':11,51 'heat':40 'illumin':1 'imag':16,55 'implant':44 'inspect':2 'laser':13,53 'level':45,57 'machin':21,58 'manual':71 'manufactur':25,60 'measur':4 'oper':70 'panel':32,67 'process':14,54 'scanner':10,49 'semiconductor':26,61 'softwar':35 'sold':72 'stepper':9,48 'substrat':29,64 'system':20 'therewith':74 'togeth':73 'treat':41 'use':7,23,37 'wafer':27,62

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