U.S. federal trademark · Serial No. 77122086 · Reg. No. 5098196
Computer software for electron beam lithography system; computer software for use in electron beam lithography system which exposes electron beam on the wafer to form circuit patterns; computer operating system for managing operation of software for use in electron beam lithography system; computer operating system for managing operation of applications software for use in electron beam lithography system; control software for writing electron beam on the wafer
Design, programming and maintenance of computer software for use in electron beam lithography system; design, programming and maintenance of computer software for use in electron beam lithography system which exposes electron beam on the wafer to form circuit patterns; design, programming and maintenance of computer operating system for managing operation of software for use in electron beam lithography system; design, programming and maintenance of computer operating system for managing operation of application software for use in electron beam lithography system; design, programming and maintenance of control software for writing electron beam on the wafer; design, programming and maintenance of computer software
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