UV WAFER

Owner

Goods & Services

Apparatus and instruments for physics, namely, ultraviolet (UV) radiation-measurement wafers equipped with embedded UV-sensitive electronic sensors for monitoring wafer level UV exposure and UV intensity inside semiconductor processing chambers; Diagnostic equipment for research laboratory use, namely, UV sensing wafers for measuring ultraviolet radiation levels, thermal behavior, and chamber environmental conditions during semiconductor wafer processing; Measures for measuring UV radiation, UV power, and environmental characteristics within semiconductor process chambers; Computer software, recorded, for collecting, analyzing, and displaying ultraviolet radiation measurement data obtained during semiconductor processing; Computer software applications, downloadable, for collecting, analyzing, and displaying ultraviolet radiation measurement data obtained during semiconductor processing