U.S. federal trademark · Serial No. 75035604 · Reg. No. 2137740
apparatus for cleaning and rinsing semiconductor wafers in which wafers may be placed into a tank and subjected to a series of liquid cleaning and rinsing steps while being subjected to megasonic energy propagated into the liquid
Source: USPTO federal trademark records. Informational only, not legal advice. Status and details may lag the live USPTO database.