MAINTENANCE OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

'equip':5 'mainten':1 'manufactur':4 'semiconductor':3

COMPUTER SOFTWARE, NAMELY, DOWNLOADABLE SOFTWARE WHICH REMOTELY MONITORS THE CONDITION AND FUNCTIONALITY OF SEMICONDUCTOR MANUFACTURING EQUIPMENT AND WHICH TRIGGERS PARAMETRIC, TIME-BASED AND WAFER-BASED MAINTENANCE NOTIFICATIONS

'base':23,27 'comput':1 'condit':10 'download':4 'equip':16 'function':12 'mainten':28 'manufactur':15 'monitor':8 'name':3 'notif':29 'parametr':20 'remot':7 'semiconductor':14 'softwar':2,5 'time':22 'time-bas':21 'trigger':19 'wafer':26 'wafer-bas':25

REMOTE MONITORING OF THE CONDITION AND FUNCTIONALITY OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

'condit':5 'equip':11 'function':7 'manufactur':10 'monitor':2 'remot':1 'semiconductor':9

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