Machines for manufacturing semiconductors, and structural parts and fittings therefor; semiconductor manufacturing machines; semiconductor manufacturing machines and systems composed of a vacuum chamber for accommodating semiconductor wafers and structural parts and fittings therefor; industrial thermal treatment reactors and industrial chemical vapor deposition reactors, industrial chemical reactors for the thermal treatment of semiconductor wafers

'accommod':25 'chamber':23 'chemic':40,45 'compos':19 'deposit':42 'fit':9,32 'industri':34,39,44 'machin':1,13,16 'manufactur':3,12,15 'part':7,30 'reactor':37,43,46 'semiconductor':4,11,14,26,52 'structur':6,29 'system':18 'therefor':10,33 'thermal':35,49 'treatment':36,50 'vacuum':22 'vapor':41 'wafer':27,53

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