Material handling machines for loading and unloading standard mechanical interface containers during the manufacture of semiconductor wafers, flat panel displays, magnetic media, and reticles; factory automation machines for loading and unloading standard mechanical interface containers during the manufacture of semiconductor wafers, flat panel displays, magnetic media, and reticles

'autom':26 'contain':11,35 'display':20,44 'factori':25 'flat':18,42 'handl':2 'interfac':10,34 'load':5,29 'machin':3,27 'magnet':21,45 'manufactur':14,38 'materi':1 'mechan':9,33 'media':22,46 'panel':19,43 'reticl':24,48 'semiconductor':16,40 'standard':8,32 'unload':7,31 'wafer':17,41

Computer hardware and related computer software for controlling material handling machines and factory automation equipment

'autom':14 'comput':1,5 'control':8 'equip':15 'factori':13 'handl':10 'hardwar':2 'machin':11 'materi':9 'relat':4 'softwar':6

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