electromechanical system consisting of pneumatic controls, associated control firmware, motor drives, and internal processing and communications functions for integration into end-user process equipment that transports delicate precision products such as integrated circuits to, through and from various manufacturing, testing, processing and installation apparatus

'apparatus':45 'associ':7 'circuit':34 'communic':16 'consist':3 'control':6,8 'delic':28 'drive':11 'electromechan':1 'end':22 'end-us':21 'equip':25 'firmwar':9 'function':17 'instal':44 'integr':19,33 'intern':13 'manufactur':40 'motor':10 'pneumat':5 'precis':29 'process':14,24,42 'product':30 'system':2 'test':41 'transport':27 'user':23 'various':39

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