U.S. federal trademark · Serial No. 76175311 · Reg. No. 2851213
machines for use in the manufacture and processing of semiconductors, semiconductor wafers, and substrates incorporating semiconductors, and replacement parts for use therewith; machines for the manufacture and processing of computer hardware, computer software, and computer components, namely, thin film processing machines, wafer processing machines, etch technology processing machines, and deposition technology processing machines, and replacement parts for use therewith
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