Optical inspection apparatus for inspection and measurement of semiconductor wafers and similar substrates in various stages of processing comprised of a control computer, software, automatic recipe controlled sample handling, monochromatic illumination sources, light sensors, cameras, optical filters, and monochrometers and spectrometers

'apparatus':3 'automat':25 'camera':35 'compris':19 'comput':23 'control':22,27 'filter':37 'handl':29 'illumin':31 'inspect':2,5 'light':33 'measur':7 'monochromat':30 'monochromet':39 'optic':1,36 'process':18 'recip':26 'sampl':28 'semiconductor':9 'sensor':34 'similar':12 'softwar':24 'sourc':32 'spectromet':41 'stage':16 'substrat':13 'various':15 'wafer':10

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