mechanically operated implements, namely, tools for single substrate wet processing with our without using chemicals for cleaning and etching microelectronic, micro-optical and micromechanical components, namely, wafers, photomasks and semi-finished components for chips and structural parts therefor

'chemic':15 'chip':36 'clean':17 'compon':26,34 'etch':19 'finish':33 'implement':3 'mechan':1 'micro':22 'micro-opt':21 'microelectron':20 'micromechan':25 'name':4,27 'oper':2 'optic':23 'part':39 'photomask':29 'process':10 'semi':32 'semi-finish':31 'singl':7 'structur':38 'substrat':8 'therefor':40 'tool':5 'use':14 'wafer':28 'wet':9 'without':13

machines for single substrate processing for drip-drying micro-optical and micro-mechanical components, namely chips/ic's, photo masks and semi-finished components for chips and structural parts therefor

'chip':29 'chips/ic':19 'compon':17,27 'dri':9 'drip':8 'drip-dri':7 'finish':26 'machin':1 'mask':22 'mechan':16 'micro':11,15 'micro-mechan':14 'micro-opt':10 'name':18 'optic':12 'part':32 'photo':21 'process':5 'semi':25 'semi-finish':24 'singl':3 'structur':31 'substrat':4 'therefor':33

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