mechanically operated implements, namely, tools for single substrate wet processing with our without using chemicals for cleaning and etching microelectronic, micro-optical and micromechanical components, namely, wafers, photomasks and semi-finished components for chips and structural parts therefor

'chemic':15 'chip':36 'clean':17 'compon':26,34 'etch':19 'finish':33 'implement':3 'mechan':1 'micro':22 'micro-opt':21 'microelectron':20 'micromechan':25 'name':4,27 'oper':2 'optic':23 'part':39 'photomask':29 'process':10 'semi':32 'semi-finish':31 'singl':7 'structur':38 'substrat':8 'therefor':40 'tool':5 'use':14 'wafer':28 'wet':9 'without':13

machines for single substrate processing for drip-drying and drying micro-optical and micro-mechanical components, namely, chips/ic's, photo masks and semi-finished components for chips and structural parts therefor

'chip':31 'chips/ic':21 'compon':19,29 'dri':9,11 'drip':8 'drip-dri':7 'finish':28 'machin':1 'mask':24 'mechan':18 'micro':13,17 'micro-mechan':16 'micro-opt':12 'name':20 'optic':14 'part':34 'photo':23 'process':5 'semi':27 'semi-finish':26 'singl':3 'structur':33 'substrat':4 'therefor':35

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