Machine operated micro lithography equipment; machines for use in the manufacture by micro-lithography, especially of electronic components, namely, integrated circuits, semi-conductors, magnetic domain memories and integral optical systems; parts and fittings for all the aforesaid goods

'aforesaid':39 'circuit':22 'compon':19 'conductor':25 'domain':27 'electron':18 'equip':5 'especi':16 'fit':35 'good':40 'integr':21,30 'lithographi':4,15 'machin':1,6 'magnet':26 'manufactur':11 'memori':28 'micro':3,14 'micro-lithographi':13 'name':20 'oper':2 'optic':31 'part':33 'semi':24 'semi-conductor':23 'system':32 'use':8

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