Software for electron beam writing and process technology, in particular, for simulating and optimizing high-resolution electron beam writing and nanometer process technologies; software for the design, testing and fabrication of photographic masks; electronic semi-conductors; integrated circuits; photo-lithographic masks; magnetic heads; chips, namely, chips for testing and investigating genes or other biological molecules, LCD panels, flat panel display screens, magnetic domain memories

'beam':4,19 'biolog':57 'chip':47,49 'circuit':40 'conductor':38 'design':28 'display':63 'domain':66 'electron':3,18,35 'fabric':31 'flat':61 'gene':54 'head':46 'high':16 'high-resolut':15 'integr':39 'investig':53 'lcd':59 'lithograph':43 'magnet':45,65 'mask':34,44 'memori':67 'molecul':58 'name':48 'nanomet':22 'optim':14 'panel':60,62 'particular':10 'photo':42 'photo-lithograph':41 'photograph':33 'process':7,23 'resolut':17 'screen':64 'semi':37 'semi-conductor':36 'simul':12 'softwar':1,25 'technolog':8,24 'test':29,51 'write':5,20

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